Nano-Scale Lateral Milling with Focused Ion Beam for Ultra-Smooth Optical Device Surface
نویسندگان
چکیده
The effect of the nano-scale lateral milling process using a focused ion beam (FIB) was studied in order to prepare a flat and smooth surface suitable for the growth of optical device structures such as a distributed Bragg reflector (DBR) mirror on a rough gallium nitride (GaN) surface. A high-quality, smooth, and flat surface is very essential for high precision space optics. It was fabricated using the nano-scale lateral milling process and was analyzed using an atomic force microscope. A regular geometric corrugation ripple with an amplitude of 18Å was achieved using a 30 KeV gallium ion-beam oriented at a normal angle of incidence operating at a beam current of 7nA. We suggest a simple engineering model for the formation of regular geometric ripples made by the serial cutting sequence of focused ion beam. This model can improve various device fabrications with a focused ion beam.
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